Thermo-magnetic metal flexure actuators

Abstract

Deep X-ray lithography and metal plating when coupled with a sacrificial layer, SLIGA, lends itself to the fabrication of very high aspect ratio metal structures which are mechanically stiff in the substrate direction and can be very flexible in the direction parallel to the substrate. These properties can be exploited by producing a family of new flexure actuators which can produce very significant motion via thermal expansion and magnetic forces. The magnitude of thermal effects and magnetic forces are dependent on actuator geometry. An understanding of each effect allows the design of an actuator which is dominated by one or both effects. The end result is devices intended for large motion actuators in microswitch and positioning applications. They are also useful for material constant measurements of electroplated metals.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>