M. Laudon

Thermo-magnetic metal flexure actuators

H. Guckel, J. Klein, Todd R. Christenson et al. · 2003 · 208 citations

Engineering, Materials Engineering, Materials Science +16

Mechanical characterization of a new high-aspect-ratio near UV-photoresist

H. Lorenz, M. Laudon, Philippe Renaud · Microelectronic Engineering · 1998 · 192 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

Multiscale modeling of stress-mediated diffusion in silicon: <i>Ab initio</i> to continuum

M. Laudon, Neil Carlson, Murray S. Daw et al. · Applied Physics Letters · 2001 · 31 citations

Engineering, Materials Engineering, Materials Science +17

Optimization of the refractory x-ray mask fabrication sequence

K. D. Cummings, William J. Dauksher, William A. Johnson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 11 citations

Engineering, Materials Engineering, Materials Science +14

Practical considerations in x-ray mask mounting methodology

Daniel Laird, M. Laudon, R. L. Engelstad · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 10 citations

Engineering, Manufacturing Engineering, Digital Fabrication +6