Concepedia

R. L. Engelstad

RL

7

Publications

108

Citations

7

H-Index

1989

Active since

Affiliations

University of Wisconsin–Madison(Current)

Pulse Biosciences (United States)

R. L. Engelstad is an author at University of Wisconsin–Madison specializing in engineering, microfabrication, and applied physics.

Top concepts

Publications per year

1989–2005

7

Publications

7

Finite element analysis of a scanning x-ray microscope micropositioning stage

H. T. H. Chen, W. Ng, R. L. Engelstad · Review of Scientific Instruments · 1992 · 31 citations

, , +30

Control of the receding meniscus in immersion lithography

Holly B. Burnett, Timothy A. Shedd, Gregory Nellis et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 19 citations · Full text

, , +15

LIBRA–A light ion beam inertial confinement fusion reactor conceptual design

G.A. Moses, G.L. Kulcinski, D. Bruggink et al. · Laser and Particle Beams · 1989 · 13 citations

, , +18

LIBRA - a light beam fusion conceptual reactor design

B. Badger, G.A. Moses, R. L. Engelstad et al. · Repository KITopen (Karlsruhe Institute of Technology) · 1990 · 13 citations · Full text

Particle-induced distortion in extreme ultraviolet lithography reticles during exposure chucking

R. Tejeda, R. L. Engelstad, Edward G. Lovell et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 12 citations

, , +12

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