3
Publications
41
Citations
3
H-Index
1998
Active since
Affiliations
University of Wisconsin–Madison(Current)
R. Tejeda is an author at University of Wisconsin–Madison specializing in applied physics, engineering, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicrofabricationMicroelectronicsElectrical EngineeringPhysicsMicroscopy3D PrintingInstrumentationSurface Science
Publications per year
1998–2002
3
3
Finite element modeling of ion-beam lithography masks for pattern transfer distortions
Gary A. Frisque, R. Tejeda, Edward G. Lovell et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 16 citations
Engineering, Electron-beam Lithography, Finite Element Modeling +18
<i>p-n</i> junction-based wafer flow process for stencil mask fabrication
Ivo W. Rangelow, F.G. Shi, B. Volland et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 13 citations
Materials Science, Electrical Engineering, Wafer Scale Processing +15
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