Concepedia

Gary A. Frisque

GA

2

Publications

31

Citations

2

H-Index

1999

Active since

Affiliations

University of Wisconsin–Madison(Current)

Gary A. Frisque is an author at University of Wisconsin–Madison specializing in microfabrication, microelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabrication3D PrintingElectronic PackagingElectrical EngineeringMechanical EngineeringComputational Electromagnetics

Publications per year

1999–2000

2

Publications

2

Finite element modeling of ion-beam lithography masks for pattern transfer distortions

Gary A. Frisque, R. Tejeda, Edward G. Lovell et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 16 citations

Engineering, Electron-beam Lithography, Finite Element Modeling +18

<title>Pattern transfer distortions in IPL and EPL masks with pattern density gradients</title>

Gary A. Frisque, Edward G. Lovell, Roxann L. Engelstad · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 15 citations

Engineering, Electron-beam Lithography, Beam Lithography +11

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