Concepedia

H. Lorenz

HL

15

Publications

2.6K

Citations

15

H-Index

1996

Active since

Affiliations

École Polytechnique Fédérale de Lausanne(Current)

IBM Research - Zurich

University of Neuchâtel

IBM (United States)

H. Lorenz is an author at École Polytechnique Fédérale de Lausanne specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMicrofabricationMaterial ScienceMechanical Engineering3D PrintingMicrostructureApplied PhysicsMechanical SystemsOptical PropertiesMechanics

Publications per year

1996–2014

15

Publications

15

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 967 citations · Full text

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 572 citations · Full text

Materials Science, Photonics, Image Sensor +8

Mechanical characterization of a new high-aspect-ratio near UV-photoresist

H. Lorenz, M. Laudon, Philippe Renaud · Microelectronic Engineering · 1998 · 191 citations · Full text

Materials Science, Engineering, Mechanical Properties +7

3D microfabrication by combining microstereolithography and thick resist UV lithography

Arnaud Bertsch, H. Lorenz, Philippe Renaud · Sensors and Actuators A Physical · 1999 · 174 citations · Full text

Materials Science, Engineering, Microfabrication +6

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

H. Lorenz, M. Despont, P. Vettiger et al. · Microsystem Technologies · 1998 · 149 citations · Full text

Materials Science, Engineering, Su-8 Uv Resist +9

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