H. Lorenz

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text

Engineering, Materials Engineering, Materials Science +11

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Mechanical characterization of a new high-aspect-ratio near UV-photoresist

H. Lorenz, M. Laudon, Philippe Renaud · Microelectronic Engineering · 1998 · 192 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

3D microfabrication by combining microstereolithography and thick resist UV lithography

Arnaud Bertsch, H. Lorenz, Philippe Renaud · Sensors and Actuators A Physical · 1999 · 174 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +11

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

H. Lorenz, M. Despont, P. Vettiger et al. · Microsystem Technologies · 1998 · 149 citations · Full text

Engineering, Materials Engineering, Materials Science +8