Concepedia

N. Fahrni

NF

3

Publications

1.7K

Citations

3

H-Index

1997

Active since

Affiliations

IBM Research - Zurich(Current)

École Polytechnique Fédérale de Lausanne

N. Fahrni is an author at IBM Research - Zurich specializing in optoelectronics, applied physics, and optical properties.

Top concepts

Publications per year

1997–2002

3

Publications

3

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 967 citations · Full text

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 572 citations · Full text

, , +8

High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications

M. Despont, H. Lorenz, N. Fahrni et al. · 2002 · 133 citations

, , +18

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