Concepedia

N. Fahrni

NF

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Publications

3

Citations

1.7K

H-Index

3

Active since

1997

Affiliations

IBM Research - Zurich(Current)

École Polytechnique Fédérale de Lausanne

N. Fahrni is an author at IBM Research - Zurich specializing in mems fabrication, mems materials, and engineering.

Publications per year

1997–2002

3

Publications

3

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text

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High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

, , +12

High-aspect-ratio, ultrathick, negative-tone near-uv photoresist for MEMS applications

M. Despont, H. Lorenz, N. Fahrni et al. · 2002 · 133 citations

, , +13

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