M. Despont

SU-8: a low-cost negative resist for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text

Engineering, Materials Engineering, Materials Science +11

The "millipede" - nanotechnology entering data storage

P. Vettiger, Graham L. W. Cross, M. Despont et al. · IEEE Transactions on Nanotechnology · 2002 · 742 citations

Engineering, Materials Engineering, Materials Science +14

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

The “Millipede”—More than thousand tips for future AFM storage

P. Vettiger, M. Despont, Ute Drechsler et al. · IBM Journal of Research and Development · 2000 · 566 citations

Engineering, Materials Engineering, Materials Science +13

A cantilever array-based artificial nose

Marko Baller, H.P. Lang, Jürgen Fritz et al. · Ultramicroscopy · 2000 · 346 citations

Engineering, Mechanical Engineering, Biomems +6