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Publication | Open Access

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

DOIFull Paper Access

572

Citations

10

References

1998

Year

H. Lorenz, M. Despont, N. Fahrni, Juergen Brügger, P. Vettiger, Philippe Renaud
Sensors and Actuators A Physical

References

YearCitations

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