P. Vettiger

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 572 citations · Full text

Materials Science, Photonics, Image Sensor +8

Ion-beam patterning of magnetic films using stencil masks

B. D. Terris, L. Folks, D. Weller et al. · Applied Physics Letters · 1999 · 196 citations

Magnetic Properties, Engineering, Microscopy +23

Ultrahigh density, high-data-rate NEMS-based AFM data storage system

P. Vettiger, Juergen Brügger, M. Despont et al. · Microelectronic Engineering · 1999 · 183 citations

Non-volatile Memory, Engineering, Storage Area Network +5

Temperature dependence of the force sensitivity of silicon cantilevers

Urs Gysin, S. Rast, Philip Ruff et al. · Physical Review B · 2004 · 163 citations

Engineering, Micromechanics, Mechanics +15

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

H. Lorenz, M. Despont, P. Vettiger et al. · Microsystem Technologies · 1998 · 149 citations · Full text

Materials Science, Engineering, Su-8 Uv Resist +9