Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist - Concepedia

Concepedia

Publication | Open Access

Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist

DOI Full Paper Access

149

Citations

0

References

1998

Year

H. Lorenz, M. Despont, P. Vettiger, Philippe Renaud

Microsystem Technologies

Materials ScienceEngineeringSu-8 Uv ResistMicrofabricationMechanical EngineeringFabrication TechniquePhotopolymer NetworkMicromachiningMicro-optical Component3D PrintingMicrostructureNanolithography Method

No additional data available for this publication yet. Check back later!