Concepedia

Precision Microfabrication

Precision Microfabrication is a laser-based manufacturing technique that enables the controlled structuring of materials at micrometer to sub-micrometer scales with minimal thermal damage and high dimensional accuracy.

945

Publications

41.5K

Citations

3.5K

Authors

876

Institutions

Publications per year

2017–2026

242

Parents

Publications

945

Ultralight, ultrastiff mechanical metamaterials

Xiaoyu Zheng, Howon Lee, Todd H. Weisgraber et al. · Science · 2014 · 2.2K citations · Full text

, , +16

Microphotonics devices based on silicon microfabrication technology

Tai Tsuchizawa, Koji Yamada, Hiroshi Fukuda et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2005 · 692 citations

, , +16

Machining of sub-micron holes using a femtosecond laser at 800 nm

P. P. Pronko, S. K. Dutta, Jeffrey A. Squier et al. · Optics Communications · 1995 · 482 citations

, , +14

Survey of sticking effects for micro parts handling

Ronald S. Fearing · 2002 · 404 citations

, , +14

Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Qiang Geng, Dien Wang, Shih‐Chi Chen · Nature Communications · 2019 · 395 citations · Full text

, , +14

1–5 of 945

Authors

3.5K

  1. HS
    Hong‐Bo Sun

    Jilin University, China

    10 publications · 929 citations

    10

    h-index

  2. ZS
    Zongbao Shen

    Jiangsu University, China

    9 publications · 240 citations

    9

    h-index

  3. HL
    Huixia Liu

    Jiangsu University, China

    9 publications · 240 citations

    9

    h-index

  4. ST
    Suet To

    Hong Kong Polytechnic University, Hong Kong SAR China

    8 publications · 514 citations

    8

    h-index

  5. WE
    W. Ehrfeld

    Fraunhofer Institute for Microengineering and Microsystems, Germany

    6 publications · 328 citations

    6

    h-index

1–5 of 3.5K

Institutions

876

  1. Centre National de la Recherche Scientifique

    Paris, France

    19 h-index

    107 publications

    4.5K citations

  2. The University of Osaka

    Osaka, Japan

    14 h-index

    40 publications

    4K citations

  3. Hong Kong Polytechnic University

    Hong Kong, Hong Kong

    13 h-index

    29 publications

    1.1K citations

  4. Chinese Academy of Sciences

    Beijing, China

    13 h-index

    54 publications

    3.1K citations

  5. Harbin Institute of Technology

    Harbin, China

    13 h-index

    58 publications

    1.9K citations

  6. National University of Singapore

    Singapore, Singapore

    12 h-index

    35 publications

    1.7K citations

  7. University of California, Berkeley

    Berkeley, United States

    12 h-index

    32 publications

    4K citations

  8. Jiangsu University

    Zhenjiang, China

    12 h-index

    66 publications

    1.8K citations

1–8 of 876

Venues

  1. Journal of Materials Processing Technology

    29 publications · 1.5K citations

    22

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 31 publications · 1.2K citations

    21

    h-index

  3. 21

    h-index

  4. Sensors and Actuators A Physical

    21 publications · 1.1K citations

    20

    h-index

  5. Precision Engineering

    23 publications · 1.1K citations

    20

    h-index

1–5