Riikka L. Puurunen

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Publications

Citations

8.3K

H-Index

Active since

2000

Affiliations

VTT Technical Research Centre of Finland(Current)

Aalto University

University of Jyväskylä

IMEC

Tieto (Finland)

Riikka L. Puurunen is an author at VTT Technical Research Centre of Finland specializing in natural sciences, materials science, and atomic layer deposition.

ORCID

Publications per year

2000–2025

Publications

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

Ville Miikkulainen, Markku Leskelä, Mikko Ritala et al. · Journal of Applied Physics · 2013 · 1.4K citations

Natural Sciences, Materials Engineering, Materials Science +17

Conformality in atomic layer deposition: Current status overview of analysis and modelling

Véronique Cremers, Riikka L. Puurunen, Jolien Dendooven · Applied Physics Reviews · 2019 · 500 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Island growth as a growth mode in atomic layer deposition: A phenomenological model

Riikka L. Puurunen, Wilfried Vandervorst · Journal of Applied Physics · 2004 · 324 citations

Natural Sciences, Materials Engineering, Materials Science +15

A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy

Riikka L. Puurunen · Chemical Vapor Deposition · 2014 · 230 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

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