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Materials ScienceNatural SciencesMaterials EngineeringThin FilmsMaterials ChemistryThin-film MaterialsThin-film DepositionSurface ScienceChemical Vapor DepositionPrecursor Chemistry
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1975–2015
1.5K
1.5K
Review of <scp>CVD</scp> Synthesis of Graphene
Roberto Muñoz, C. Gómez‐Aleixandre · 2013 · 609 citations · Full text
The CVD of Nanodiamond Materials
J. E. Butler, Anirudha V. Sumant · 2008 · 355 citations
Natural Sciences, Materials Engineering, Materials Science +12
Ruthenium Thin Films Grown by Atomic Layer Deposition
Titta Aaltonen, Petra Alén, Mikko Ritala et al. · 2003 · 277 citations
Natural Sciences, Materials Engineering, Materials Science +16
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