Concepedia

Petra Alén

PA

9

Publications

622

Citations

9

H-Index

2001

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Institute of Inorganic Chemistry of the Slovak Academy of Sciences

Petra Alén is an author at University of Helsinki specializing in engineering, thin films, and materials science.

Top concepts

Thin FilmsEngineeringMaterial ScienceApplied PhysicsSurface ScienceChemistryNanotechnologyMaterials EngineeringMaterial CharacterizationMicrostructure

Publications per year

2001–2006

9

Publications

9

Ruthenium Thin Films Grown by Atomic Layer Deposition

Titta Aaltonen, Petra Alén, Mikko Ritala et al. · Chemical Vapor Deposition · 2003 · 273 citations

Materials Science, Abstract Thin Films, Material Analysis +14

Atomic Layer Deposition of Molybdenum Nitride Thin Films for Cu Metallizations

Petra Alén, Mikko Ritala, Kai Arstila et al. · Journal of The Electrochemical Society · 2005 · 71 citations

Engineering, Thin Film Process Technology, Chemical Deposition +16

Atomic Layer Deposition of Ta(Al)N(C) Thin Films Using Trimethylaluminum as a Reducing Agent

Petra Alén, Marika Juppo, Mikko Ritala et al. · Journal of The Electrochemical Society · 2001 · 57 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +19

The growth and diffusion barrier properties of atomic layer deposited NbNx thin films

Petra Alén, Mikko Ritala, Kai Arstila et al. · Thin Solid Films · 2005 · 53 citations

Materials Science, Engineering, Atomic Layer +8

Trimethylaluminum as a Reducing Agent in the Atomic Layer Deposition of Ti(Al)N Thin Films

Marika Juppo, Petra Alén, Mikko Ritala et al. · Chemical Vapor Deposition · 2001 · 49 citations

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