Titta Aaltonen

Atomic Layer Deposition of Platinum Thin Films

Titta Aaltonen, Mikko Ritala, Timo Sajavaara et al. · Chemistry of Materials · 2003 · 383 citations

Materials Science, Material Analysis, Engineering +13

Ruthenium Thin Films Grown by Atomic Layer Deposition

Titta Aaltonen, Petra Alén, Mikko Ritala et al. · Chemical Vapor Deposition · 2003 · 273 citations

Materials Science, Abstract Thin Films, Material Analysis +14

Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum

Titta Aaltonen, Antti Rahtu, Mikko Ritala et al. · Electrochemical and Solid-State Letters · 2003 · 234 citations

Engineering, Chemistry, Chemical Deposition +18

Atomic layer deposition of noble metals: Exploration of the low limit of the deposition temperature

Titta Aaltonen, Mikko Ritala, Yung‐Liang Tung et al. · Journal of materials research/Pratt's guide to venture capital sources · 2004 · 162 citations

Materials Engineering, Materials Science, Engineering +12

Atomic Layer Deposition of Iridium Thin Films

Titta Aaltonen, Mikko Ritala, Väino Sammelselg et al. · Journal of The Electrochemical Society · 2004 · 150 citations

Materials Science, Surface Technology, Surface Characterization +13