Timo Sajavaara

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

Mikko Ritala, Kaupo Kukli, Antti Rahtu et al. · Science · 2000 · 482 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Atomic Layer Deposition of Platinum Thin Films

Titta Aaltonen, Mikko Ritala, Timo Sajavaara et al. · Chemistry of Materials · 2003 · 383 citations

Materials Science, Material Analysis, Engineering +13

Effect of water dose on the atomic layer deposition rate of oxide thin films

Raija Matero, Antti Rahtu, Mikko Ritala et al. · Thin Solid Films · 2000 · 255 citations

Materials Science, Engineering, Water Dose +8

Potku – New analysis software for heavy ion elastic recoil detection analysis

Kai Arstila, Jaakko Julin, Mikko Laitinen et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2014 · 237 citations

Heavy Ion Physic, Engineering, Nuclear Physics +6

Atomic Layer Deposition of Photocatalytic TiO₂ Thin Films from Titanium Tetramethoxide and Water

Viljami Pore, Antti Rahtu, Markku Leskelä et al. · Chemical Vapor Deposition · 2004 · 217 citations

Materials Science, Titanium Tetramethoxide, Engineering +14