Concepedia

Kaupo Kukli

KK

155

Publications

7.4K

Citations

51

H-Index

1994

Active since

Affiliations

University of Helsinki(Current)

University of Tartu

Uppsala University

Universidad de Valladolid

Helsinki Institute of Physics

Kaupo Kukli is an author at University of Helsinki specializing in engineering, materials science, and thin films.

ORCID

Top concepts

Publications per year

1994–2024

155

Publications

155

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

Mikko Ritala, Kaupo Kukli, Antti Rahtu et al. · Science · 2000 · 482 citations

, , +14

Tailoring the dielectric properties of HfO2–Ta2O5 nanolaminates

Kaupo Kukli, Jarkko Ihanus, Mikko Ritala et al. · Applied Physics Letters · 1996 · 224 citations

, , +15

Atomic Layer Deposition of Hafnium Dioxide Films from Hafnium Tetrakis(ethylmethylamide) and Water

Kaupo Kukli, Mikko Ritala, Timo Sajavaara et al. · Chemical Vapor Deposition · 2002 · 197 citations

, , +17

Crystallization in hafnia‐ and zirconia‐based systems

Sergey V. Ushakov, Alexandra Navrotsky, Yingju Yang et al. · physica status solidi (b) · 2004 · 162 citations

, , +12

Controlled Growth of TaN, Ta<sub>3</sub>N<sub>5</sub>, and TaO<i><sub>x</sub></i>N<i><sub>y</sub></i> Thin Films by Atomic Layer Deposition

Mikko Ritala, Pia Kalsi, Diana Riihelä et al. · Chemistry of Materials · 1999 · 158 citations

, , +19

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