Concepedia

Diana Riihelä

DR

4

Publications

381

Citations

4

H-Index

1996

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Diana Riihelä is an author at University of Helsinki specializing in applied physics, engineering, and thin films.

Top concepts

Publications per year

1996–1999

4

Publications

4

Controlled Growth of TaN, Ta<sub>3</sub>N<sub>5</sub>, and TaO<i><sub>x</sub></i>N<i><sub>y</sub></i> Thin Films by Atomic Layer Deposition

Mikko Ritala, Pia Kalsi, Diana Riihelä et al. · Chemistry of Materials · 1999 · 158 citations

, , +19

Introducing atomic layer epitaxy for the deposition of optical thin films

Diana Riihelä, Mikko Ritala, Raija Matero et al. · Thin Solid Films · 1996 · 86 citations

, , +11

Low temperature deposition of AIN films by an alternate supply of trimethyl aluminum and ammonia

Diana Riihelä, Mikko Ritala, Raija Matero et al. · Chemical Vapor Deposition · 1996 · 72 citations

, , +19

Analysis of AlN thin films by combining TOF-ERDA and NRB techniques

Janne J. Jokinen, P. Haussalo, J. Keinonen et al. · Thin Solid Films · 1996 · 65 citations

, , +9

Rows per page

1–4 of 4