Antti Rahtu

Atomic layer deposition of transition metals

Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 653 citations

Materials Science, Engineering, Surface Science +5

Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

Mikko Ritala, Kaupo Kukli, Antti Rahtu et al. · Science · 2000 · 482 citations

Materials Science, Materials Engineering, Chemical Engineering +14

Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates

Booyong S. Lim, Antti Rahtu, Jin‐Seong Park et al. · Inorganic Chemistry · 2003 · 296 citations

Materials Science, Inorganic Chemistry, Experimental Synthesis +13

Effect of water dose on the atomic layer deposition rate of oxide thin films

Raija Matero, Antti Rahtu, Mikko Ritala et al. · Thin Solid Films · 2000 · 255 citations

Materials Science, Engineering, Water Dose +8

Reaction Mechanism Studies on Atomic Layer Deposition of Ruthenium and Platinum

Titta Aaltonen, Antti Rahtu, Mikko Ritala et al. · Electrochemical and Solid-State Letters · 2003 · 234 citations

Engineering, Chemistry, Chemical Deposition +18