Atomic layer deposition of transition metals - Concepedia

Concepedia

Publication | Closed Access

Atomic layer deposition of transition metals

653

Citations

16

References

2003

Year

Booyong S. Lim, Antti Rahtu, Roy G. Gordon

Nature Materials

Materials ScienceEngineeringSurface ScienceApplied PhysicsChemical DepositionElemental MetalChemical Vapor DepositionAtomic Layer Deposition

References

	Year	Citations

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