Effect of water dose on the atomic layer deposition rate of oxide thin films - Concepedia

Concepedia

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Effect of water dose on the atomic layer deposition rate of oxide thin films

255

Citations

30

References

2000

Year

Raija Matero, Antti Rahtu, Mikko Ritala, Markku Leskelä, Timo Sajavaara

Thin Solid Films

Materials ScienceEngineeringWater DoseOxide ElectronicsSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsChemical DepositionOxide Thin FilmsThin Film Processing

References

	Year	Citations

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