Concepedia

Marika Juppo

MJ

11

Publications

605

Citations

11

H-Index

1997

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Marika Juppo is an author at University of Helsinki specializing in surface science, thin films, and engineering.

Top concepts

Thin FilmsEngineeringSurface ScienceMaterial ScienceChemistryApplied PhysicsMaterials EngineeringChemical EngineeringMaterial CharacterizationCorrosion

Publications per year

1997–2002

11

Publications

11

In Situ Mass Spectrometry Study on Surface Reactions in Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> Thin Films from Trimethylaluminum and Water

Marika Juppo, Antti Rahtu, Mikko Ritala et al. · Langmuir · 2000 · 118 citations

Engineering, Chemistry, Chemical Deposition +16

Use of 1,1-Dimethylhydrazine in the Atomic Layer Deposition of Transition Metal Nitride Thin Films

Marika Juppo, Mikko Ritala, Markku Leskelä · Journal of The Electrochemical Society · 2000 · 111 citations

Materials Science, Carbon Content, Engineering +11

Deposition of copper films by an alternate supply of CuCl and Zn

Marika Juppo, Mikko Ritala, Markku Leskelä · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 62 citations

Materials Engineering, Materials Science, Chemical Engineering +14

Atomic Layer Deposition of Ta(Al)N(C) Thin Films Using Trimethylaluminum as a Reducing Agent

Petra Alén, Marika Juppo, Mikko Ritala et al. · Journal of The Electrochemical Society · 2001 · 57 citations

Aluminium Nitride, Engineering, Thin Film Process Technology +19

Deposition of molybdenum thin films by an alternate supply of MoCl5 and Zn

Marika Juppo, Marko Vehkamäki, Mikko Ritala et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 53 citations

Materials Science, Materials Engineering, Engineering +15

Rows per page

1–5 of 11