Concepedia

Marko Vehkamäki

MV

52

Publications

2.1K

Citations

29

H-Index

1998

Active since

Affiliations

University of Helsinki(Current)

Helsinki Institute of Physics

Aalto University

VTT Technical Research Centre of Finland

University of Tartu

Marko Vehkamäki is an author at University of Helsinki specializing in engineering, materials science, and surface science.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceThin FilmsChemistryChemical EngineeringMaterials EngineeringFunctional MaterialsPhysics

Publications per year

1998–2024

52

Publications

52

Growth of SrTiO[sub 3] and BaTiO[sub 3] Thin Films by Atomic Layer Deposition

Marko Vehkamäki · Electrochemical and Solid-State Letters · 1999 · 152 citations

Materials Science, Engineering, Barium Precursors +14

Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor-Strontium-bis(tri-isopropyl cyclopentadienyl)

Marko Vehkamäki, Timo S. Hänninen, Mikko Ritala et al. · Chemical Vapor Deposition · 2001 · 111 citations

Materials Science, Epitaxial Growth, Material Analysis +15

Atomic Layer Deposition of Emerging 2D Semiconductors, HfS<sub>2</sub> and ZrS<sub>2</sub>, for Optoelectronics

Miika Mattinen, Georgi Popov, Marko Vehkamäki et al. · Chemistry of Materials · 2019 · 108 citations · Full text

Bismuth precursors for atomic layer deposition of bismuth-containing oxide films

Marko Vehkamäki, Timo Hatanpää, Mikko Ritala et al. · Journal of Materials Chemistry · 2004 · 83 citations

Materials Science, Oxide Heterostructures, Inorganic Chemistry +15

Atomic Layer Deposition of Rhenium Disulfide

Jani Hämäläinen, Miika Mattinen, Kenichiro Mizohata et al. · Advanced Materials · 2018 · 75 citations · Full text

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