Marko Vehkamäki - Concepedia

Author

Marko Vehkamäki

University of Helsinki ORCID

Also Known As

M. VEHKAMÄKI, M. Vehkamäki, Marko Vehkamaki, Marko Vehkamäki, Marko Vehkamäki, Vehkamaki, M., Vehkamäki, Marko

Publications

2.2K

Citations

H-Index

Concepts

All Affiliations

University of Helsinki Helsinki Institute of Physics Aalto University VTT Technical Research Centre of Finland University of Tartu

About

Marko Vehkamäki is an author at University of Helsinki specializing in engineering, materials science, and surface science.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	26	36	1.5K
2	Applied Physics	19	25	1.1K
3	Natural Sciences	4	4	122
4	Health Sciences	1	1	10
5	Biochemistry	1	1	32

Marko Vehkamäki

Publications

2.1K

Citations

H-Index

Page 1

	Year	Citations
Growth of SrTiO[sub 3] and BaTiO[sub 3] Thin Films by Atomic Layer Deposition Marko Vehkamäki Electrochemical and Solid-State Letters Materials ScienceEngineeringBarium PrecursorsOxide ElectronicsSurface Science	1999	152
Atomic Layer Deposition of SrTiO3 Thin Films from a Novel Strontium Precursor-Strontium-bis(tri-isopropyl cyclopentadienyl) Marko Vehkamäki, Timo S. Hänninen, Mikko Ritala, Chemical Vapor Deposition Materials ScienceEpitaxial GrowthMaterial AnalysisEngineeringSrtio3 Thin Films	2001	111
Atomic Layer Deposition of Emerging 2D Semiconductors, HfS<sub>2</sub> and ZrS<sub>2</sub>, for Optoelectronics Miika Mattinen, Georgi Popov, Marko Vehkamäki, Chemistry of Materials	2019	108
Bismuth precursors for atomic layer deposition of bismuth-containing oxide films Marko Vehkamäki, Timo Hatanpää, Mikko Ritala, Journal of Materials Chemistry Materials ScienceOxide HeterostructuresInorganic ChemistryVolatile Bismuth PrecursorsEngineering	2004	83
Atomic Layer Deposition of Rhenium Disulfide Jani Hämäläinen, Miika Mattinen, Kenichiro Mizohata, Advanced Materials	2018	75
Corrosion Protection of Steel with Oxide Nanolaminates Grown by Atomic Layer Deposition Emma Härkönen, Belén Díaz, Jolanta Światowska, Journal of The Electrochemical Society Materials ScienceMaterials EngineeringChemical EngineeringCorrosion ProtectionEngineering	2011	69
Sealing of Hard CrN and DLC Coatings with Atomic Layer Deposition Emma Härkönen, Belén Díaz, Jolanta Światowska, ACS Applied Materials & Interfaces EngineeringMechanical EngineeringChemical DepositionChemical EngineeringCorrosion	2014	65
Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study Maarit Kariniemi, Jaakko Niinistö, Marko Vehkamäki, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceChemical EngineeringRemote PealdEngineeringPhysics	2011	63
Degradation effects in TlBr single crystals under prolonged bias voltage V. Kozlov, Marianna Kemell, Marko Vehkamäki, Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment EngineeringPhysicsBias Temperature InstabilityApplied PhysicsDegradation Effects	2007	61
Atomic Layer Deposition of PbI<sub>2</sub> Thin Films Georgi Popov, Miika Mattinen, Timo Hatanpää, Chemistry of Materials	2019	60

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