Concepedia

Backside Micromachining

Backside Micromachining is a bulk micromachining technique in which material is selectively etched from the backside of a substrate to fabricate microstructures while preserving functional elements on the front side.

15

Publications

497

Citations

66

Authors

29

Institutions

Publications per year

2017–2026

5

Parents

Publications

15

State of the art micromachining

T. Masuzawa · Cirp Annals-manufacturing Technology · 2000 · 162 citations

, , +12

Crack-free micromachining on glass using an economic Q-switched 532 nm laser

Ji‐Yen Cheng, Meng-Hua Yen, Tai‐Horng Young · Journal of Micromechanics and Microengineering · 2006 · 36 citations

, , +16

Laser Induced Backside Wet Etching: Mechanisms and Fabrication of Micro-Optical Elements

G. Kopitkovas, Thomas Lippert, J. Venturini et al. · Journal of Physics Conference Series · 2007 · 36 citations · Full text

, , +16

Front-to-backside alignment using resist-patterned etch control and one etching step

E.S. Kim, R.S. Muller, R. Hijab · Journal of Microelectromechanical Systems · 1992 · 35 citations

, , +14

Low-power thick-film gas sensor obtained by a combination of screen printing and micromachining techniques

D. Vincenzi, Maria Angela Butturi, Marco Stefancich et al. · Thin Solid Films · 2001 · 29 citations · Full text

, , +15

1–5 of 15

Authors

66

  1. JC
    Ji‐Yen Cheng

    Research Center for Applied Science, Academia Sinica, Taiwan

    2 publications · 47 citations

    2

    h-index

  2. SK
    Steven Kasapi

    Nvidia (United States), United States

    1 publications · 14 citations

    1

    h-index

  3. SB
    S. Brida

    University of Trento, Italy

    1 publications · 29 citations

    1

    h-index

  4. SA
    Sung‐Hoon Ahn

    Seoul National University, South Korea

    1 publications · 21 citations

    1

    h-index

  5. MZ
    M. Zen

    University of Trento, Italy

    1 publications · 29 citations

    1

    h-index

1–5 of 66

Institutions

29

  1. Research Center for Applied Science, Academia Sinica

    Taipei, Taiwan

    2 h-index

    3 publications

    83 citations

  2. National Taipei University

    Taipei, Taiwan

    1 h-index

    1 publications

    11 citations

  3. University of Alaska Fairbanks

    Fairbanks, United States

    1 h-index

    1 publications

    18 citations

  4. University of California, Berkeley

    Berkeley, United States

    1 h-index

    1 publications

    35 citations

  5. Paul Scherrer Institute

    Villigen, Switzerland

    1 h-index

    4 publications

    144 citations

  6. Harbin Institute of Technology

    Harbin, China

    1 h-index

    6 publications

    78 citations

  7. Nvidia (United States)

    Santa Clara, United States

    1 h-index

    1 publications

    14 citations

  8. Indian Institute of Technology Madras

    Chennai, India

    1 h-index

    4 publications

    116 citations

1–8 of 29

Venues

  1. Journal of Microelectromechanical Systems

    2 publications · 53 citations

    2

    h-index

  2. Methods in molecular biology

    Book series · 1 publications · 29 citations

    1

    h-index

  3. Thin Solid Films

    1 publications · 29 citations

    1

    h-index

  4. 1

    h-index

  5. Microsystem Technologies

    1 publications · 19 citations

    1

    h-index

1–5