Concepedia

Crystallographic Etching

Crystallographic Etching is a micromachining technique that selectively removes material from a crystalline substrate by exploiting the anisotropic etch rates inherent to different crystallographic planes, thereby enabling precise, geometry-controlled fabrication of microstructures.

63

Publications

3K

Citations

225

Authors

84

Institutions

Publications per year

2017–2026

4

Parents

Publications

63

Crystallographic Etching of Few-Layer Graphene

Sujit S. Datta, Douglas R. Strachan, Samuel M. Khamis et al. · Nano Letters · 2008 · 556 citations · Full text

, , +17

Etching Mechanism of Monoatomic Aluminum Layers during MXene Synthesis

Yong-Jae Kim, Seon Joon Kim, Darae Seo et al. · Chemistry of Materials · 2021 · 277 citations

, , +16

Crystallographic wet chemical etching of GaN

D. A. Stocker, E. Fred Schubert, Joan M. Redwing · Applied Physics Letters · 1998 · 218 citations

, , +17

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 153 citations

, , +16

On the Topotactic Transformation of <scp> <scp> Ti <sub>2</sub> AlC </scp> </scp> into a <scp> <scp>Ti–C–O–F</scp> </scp> Cubic Phase by Heating in Molten Lithium Fluoride in Air

Michael Naguib, Volker Presser, Darin J. Tallman et al. · Journal of the American Ceramic Society · 2011 · 123 citations · Full text

, , +17

1–5 of 63

Authors

225

  1. JM
    Joan M. Redwing

    Pennsylvania State University, United States

    2 publications · 238 citations

    2

    h-index

  2. DF
    Daniel Flamm

    Friedrich Schiller University Jena, Germany

    2 publications · 143 citations

    2

    h-index

  3. KA
    Kazuo Asaumi

    Nagoya University, Japan

    2 publications · 163 citations

    2

    h-index

  4. YB
    Ylva Bäcklund

    Uppsala University, Sweden

    2 publications · 108 citations

    2

    h-index

  5. MS
    Mitsuhiro Shikida

    Nagoya University, Japan

    2 publications · 163 citations

    2

    h-index

1–5 of 225

Institutions

84

  1. Massachusetts Institute of Technology

    Cambridge, United States

    4 h-index

    10 publications

    342 citations

  2. Uppsala University

    Uppsala, Sweden

    2 h-index

    6 publications

    314 citations

  3. Royal Holloway University of London

    Egham, United Kingdom

    2 h-index

    4 publications

    104 citations

  4. RTX (United States)

    Arlington, United States

    2 h-index

    2 publications

    41 citations

  5. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    2 h-index

    10 publications

    315 citations

  6. Nagoya University

    Nagoya, Japan

    2 h-index

    6 publications

    489 citations

  7. Drexel University

    Philadelphia, United States

    2 h-index

    7 publications

    1.2K citations

  8. Aichi Prefectural Government

    Nagoya, Japan

    2 h-index

    2 publications

    163 citations

1–8 of 84

Venues

  1. Journal of The Electrochemical Society

    JES · 7 publications · 289 citations

    7

    h-index

  2. Journal of Applied Physics

    6 publications · 193 citations

    6

    h-index

  3. Applied Physics Letters

    4 publications · 338 citations

    4

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 2 publications · 108 citations

    2

    h-index

  5. physica status solidi (a)

    2 publications · 36 citations

    2

    h-index

1–5