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Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

DOI

151

Citations

8

References

1999

Year

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Kazuo Asaumi, Yasuroh Iriye, Masaharu Yamamoto
Sensors and Actuators A Physical

References

YearCitations

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