Kazuo Asaumi

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 321 citations

Engineering, Materials Engineering, Materials Science +12

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 153 citations

Natural Sciences, Materials Engineering, Materials Science +16

A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching-rate diagram

Mitsuhiro Shikida, Ken-ichi Nanbara, Tohru Koizumi et al. · Sensors and Actuators A Physical · 2002 · 66 citations

Engineering, Electrical Engineering, Materials Science +15

Non-photolithographic pattern transfer for fabricating pen-shaped microneedle structures

Mitsuhiro Shikida, Masaki Ando, Yuji ISHIHARA et al. · Journal of Micromechanics and Microengineering · 2004 · 55 citations

Engineering, Bioengineering, Biomedical Engineering +16

Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon

Kazuo Asaumi, Yasuroh Iriye, K. Satō · 2002 · 47 citations

Engineering, Computational Engineering, Materials Science +14