Concepedia

Tohru Koizumi

TK

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Publications

1

Citations

66

H-Index

1

Active since

2002

Affiliations

Mount Fuji Research Institute(Current)

Tohru Koizumi is an author at Mount Fuji Research Institute specializing in applied physics, microfabrication, and microelectronics.

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Publications per year

2002–2002

1

Publications

1

A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching-rate diagram

Mitsuhiro Shikida, Ken-ichi Nanbara, Tohru Koizumi et al. · Sensors and Actuators A Physical · 2002 · 66 citations

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