Mitsuhiro Shikida - Concepedia

Author

Mitsuhiro Shikida

Nagoya University ORCID

Also Known As

M Shikida, M. SHIKIDA, M. Shikida, Mitsuhiro SHIKIDA, Mitsuhiro Shikida, Shikida Mitsuhiro

391

Publications

5.2K

Citations

H-Index

148

Concepts

All Affiliations

Nagoya University Hiroshima City University Nagoya City University Mount Fuji Research Institute Hitachi (Japan)

About

Mitsuhiro Shikida is an author at Nagoya University specializing in engineering, materials science, and microfabrication.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	38	101	4.4K
2	Medicine	8	8	250
3	Education	4	4	104
4	Natural Sciences	2	2	82
5	Health Sciences	1	1	12

Mitsuhiro Shikida

107

Publications

4.6K

Citations

H-Index

Page 1

	Year	Citations
Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima, Sensors and Actuators A Physical Materials ScienceMaterials EngineeringWafer Scale ProcessingEngineeringSingle-crystal Silicon	1998	316
Differences in anisotropic etching properties of KOH and TMAH solutions Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro, Sensors and Actuators A Physical Materials ScienceMaterials EngineeringSurface CharacterizationEngineeringElectron-beam Lithography	2000	248
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Sensors and Actuators A Physical Materials ScienceTmah Water SolutionEngineeringPhysicsMicrofabrication	1999	151
Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip Kazuo Sato, T. Yoshioka, Taeko Ando, Sensors and Actuators A Physical Materials ScienceDifferent Crystallographic OrientationsWafer Scale ProcessingEngineeringMicrofabrication	1998	150
Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis Kosuke Ino, Mina Okochi, Nao Konishi, Lab on a Chip	2007	146
Roughening of single-crystal silicon surface etched by KOH water solution Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Sensors and Actuators A Physical Materials ScienceMaterials EngineeringEngineeringMicrofabricationSurface Science	1999	131
Active tactile sensor for detecting contact force and hardness of an object Mitsuhiro Shikida, Takeshi Shimizu, Kazuo Sato, Sensors and Actuators A Physical Tactile SensingHaptic FeedbackEngineeringSoft RoboticsMechanics	2002	126
Tensile-mode fatigue testing of silicon films as structural materials for MEMS Taeko Ando, Mitsuhiro Shikida, Kazuo Sato Sensors and Actuators A Physical Materials ScienceEngineeringLow-cycle FatigueMicrofabricationMechanical Engineering	2001	118
Effect of temperature on fracture toughness in a single-crystal-silicon film and transition in its fracture mode Shigeki Nakao, Taeko Ando, Mitsuhiro Shikida, Journal of Micromechanics and Microengineering EngineeringMechanical EngineeringNotch TipFracture ModeMicrostructure-strength Relationship	2007	97
Using wettability and interfacial tension to handle droplets of magnetic beads in a micro-chemical-analysis system Mitsuhiro Shikida, Kentaro Takayanagi, Kohta Inouchi, Sensors and Actuators B Chemical Materials ScienceMagnetismFerrofluidEngineeringMicrofabrication	2005	93

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