Mitsuhiro Shikida

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 316 citations

Materials Science, Materials Engineering, Wafer Scale Processing +11

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro et al. · Sensors and Actuators A Physical · 2000 · 248 citations

Materials Science, Materials Engineering, Surface Characterization +9

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 151 citations

Materials Science, Tmah Water Solution, Engineering +11

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

Kazuo Sato, T. Yoshioka, Taeko Ando et al. · Sensors and Actuators A Physical · 1998 · 150 citations

Materials Science, Different Crystallographic Orientations, Wafer Scale Processing +11

Cell culture arrays using magnetic force-based cell patterning for dynamic single cell analysis

Kosuke Ino, Mina Okochi, Nao Konishi et al. · Lab on a Chip · 2007 · 146 citations