Publication | Closed Access
Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
150
Citations
5
References
1998
Year
Materials ScienceDifferent Crystallographic OrientationsWafer Scale ProcessingEngineeringMicrofabricationApplied PhysicsStressstrain AnalysisSilicon ChipSolid MechanicsSemiconductor Device FabricationSilicon FilmSilicon On InsulatorMechanics Of MaterialsSilicon Debugging
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