Concepedia
Statistics
Publications
155
Citations
6.3K
H-Index
44
Active since
1958
Affiliations
Nagoya University(Current)
Aichi Institute of Technology
Tohoku University
National Research Institute of Brewing
Kazuo Sato is an author at Nagoya University specializing in materials science, engineering, and materials engineering.
Publications per year
1958–2019
Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration
Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 321 citations
Engineering, Materials Engineering, Materials Science +12
Differences in anisotropic etching properties of KOH and TMAH solutions
Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro et al. · Sensors and Actuators A Physical · 2000 · 253 citations
Natural Sciences, Materials Engineering, Materials Science +9
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation
Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 153 citations
Natural Sciences, Materials Engineering, Materials Science +16
Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip
Kazuo Sato, T. Yoshioka, Taeko Ando et al. · Sensors and Actuators A Physical · 1998 · 150 citations
Morphology control of binary polymer mixtures by spinodal decomposition and crystallization. 1. Principle of method and preliminary results on PP/EPR
Nobuyuki Inaba, Kazuo Sato, Shyunichi Suzuki et al. · Macromolecules · 1986 · 147 citations
Natural Sciences, Chemistry, Materials Science +17
1–5 of 155