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Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

DOI

316

Citations

6

References

1998

Year

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima, Takashi Yamashiro, Kazuo Asaumi, Yasuroh Iriye, Masaharu Yamamoto
Sensors and Actuators A Physical

References

YearCitations

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