Concepedia
Statistics
Publications
15
Citations
815
H-Index
12
Active since
1998
Affiliations
Nagoya University(Current)
Mount Fuji Research Institute
Mizuho (Japan)
Osaka Prefecture University
Aichi Prefectural Government
Yasuroh Iriye is an author at Nagoya University specializing in materials science, engineering, and materials engineering.
Publications per year
1998–2011
Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration
Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima et al. · Sensors and Actuators A Physical · 1998 · 321 citations
Engineering, Materials Engineering, Materials Science +12
Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation
Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 153 citations
Natural Sciences, Materials Engineering, Materials Science +16
Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process
Hideki Takagi, Masaharu Takahashi, Ryutaro Maeda et al. · Microelectronic Engineering · 2008 · 51 citations
Anisotropic-etching process simulation system MICROCAD analyzing complete 3D etching profiles of single crystal silicon
Kazuo Asaumi, Yasuroh Iriye, K. Satō · 2002 · 47 citations
Engineering, Computational Engineering, Materials Science +14
Fabrication of a quartz tuning-fork probe with a sharp tip for AFM systems
Hirotaka Hida, Mitsuhiro Shikida, Kenji Fukuzawa et al. · Sensors and Actuators A Physical · 2008 · 39 citations
Engineering, Materials Science, Mechanical Engineering +11
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