Concepedia

Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process

Hideki Takagi, Masaharu Takahashi, Ryutaro Maeda, Yuki ONISHI, Yasuroh Iriye, Takuya Iwasaki, Yoshihiko Hirai

Microelectronic Engineering · 2008 · 51 citations · 3 references

Concepts

Natural SciencesMaterials EngineeringMaterials SciencePolymer ChemistryPolymer EngineeringPolymer MaterialsPolymer PhysicsPolymer RheologyTime-dependent DeformationTime-dependent Rheological BehaviorViscoelastic BehaviorViscoelastic PropertiesPolymer Relaxation DynamicsPolymer ViscoelasticityRate-dependent DeformationThermorheological BehaviorViscoelastic Behavior Under Thermal LoadingViscoelastic Constitutive ModelingViscoelastic Properties Of Polymers

References

3

The Temperature Dependence of Relaxation Mechanisms in Amorphous Polymers and Other Glass-forming Liquids

M. L. Williams, Robert F. Landel, John D. Ferry · Journal of the American Chemical Society · 1955 · 7.9K citations

Natural Sciences, Chemistry, Materials Science +15

Impact of polymer film thickness and cavity size on polymer flow during embossing: toward process design rules for nanoimprint lithography

Harry D. Rowland, Amy Cha-Tien Sun, Peter Schunk et al. · Journal of Micromechanics and Microengineering · 2005 · 186 citations

Engineering, Manufacturing Engineering, Materials Science +17

Simulation and experimental study of polymer deformation in nanoimprint lithography

Yoshihiko Hirai, Takaaki Konishi, Takashi Yoshikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 173 citations

Engineering, Materials Engineering, Materials Science +17