Hideki Takagi

Surface activated bonding of silicon wafers at room temperature

Hideki Takagi, Kenya Kikuchi, Ryutaro Maeda et al. · Applied Physics Letters · 1996 · 432 citations

Materials Science, Materials Engineering, Room Temperature +14

Structure of AlAl and AlSi3N4 interfaces bonded at room temperature by means of the surface activation method

Tadatomo Suga, Yoshihiro Takahashi, Hideki Takagi et al. · Acta Metallurgica et Materialia · 1992 · 222 citations

Materials Science, Room Temperature, Interface Chemistry +7

Effect of Surface Roughness on Room-Temperature Wafer Bonding by Ar Beam Surface Activation

Hideki Takagi, Ryutaro Maeda, Teak Ryong Chung et al. · Japanese Journal of Applied Physics · 1998 · 198 citations

Engineering, Mechanical Engineering, Vacuum Device +18

High external quantum efficiency (10%) AlGaN-based deep-ultraviolet light-emitting diodes achieved by using highly reflective photonic crystal on p-AlGaN contact layer

Yukio Kashima, Noritoshi Maeda, Eriko Matsuura et al. · Applied Physics Express · 2017 · 145 citations

White Oled, Photonics, Electrical Engineering +12

Low-temperature direct bonding of silicon and silicon dioxide by the surface activation method

Hideki Takagi, Ryutaro Maeda, Teak Ryong Chung et al. · Sensors and Actuators A Physical · 1998 · 110 citations

Materials Engineering, Materials Science, Engineering +12