Kenya Kikuchi is an author at The University of Tokyo specializing in microfabrication, mechanical engineering, and electronic packaging.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingMaterials EngineeringMechanical Engineering
Publications per year
1996–1996
1
1
Surface activated bonding of silicon wafers at room temperature
Hideki Takagi, Kenya Kikuchi, Ryutaro Maeda et al. · Applied Physics Letters · 1996 · 432 citations
Materials Science, Materials Engineering, Room Temperature +14
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