Concepedia

Ylva Bäcklund

YB

Statistics

Publications

21

Citations

837

H-Index

17

Active since

1990

Affiliations

Uppsala University(Current)

Ylva Bäcklund is an author at Uppsala University specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationMicroelectronicsSurface ScienceMaterial ScienceMechanical EngineeringMicrostructureMaterials EngineeringPhotonics

Publications per year

1990–2012

21

Publications

21

Fabrication of 45° mirrors together with well-defined v-grooves using wet anisotropic etching of silicon

Carola Strandman, Lars Rosengren, H. Elderstig et al. · Journal of Microelectromechanical Systems · 1995 · 89 citations

Photonics, Optical Materials, Engineering +15

Precise mask alignment to the crystallographic orientation of silicon wafers using wet anisotropic etching

Mattias Vangbo, Ylva Bäcklund · Journal of Micromechanics and Microengineering · 1996 · 85 citations

Materials Science, Same Masking Layer, Anisotropic Wet Etching +15

A lateral symmetrically bistable buckled beam

Mattias Vangbo, Ylva Bäcklund · Journal of Micromechanics and Microengineering · 1998 · 84 citations

Engineering, Mechanical Engineering, Microactuator +18

Bond‐Strength Measurements Related to Silicon Surface Hydrophilicity

Ylva Bäcklund, Karin Hermansson, L. Smith · Journal of The Electrochemical Society · 1992 · 67 citations

Materials Science, Engineering, Bond Strength +14

New shapes in (100) Si using KOH and EDP etches

Ylva Bäcklund, Lars Rosengren · Journal of Micromechanics and Microengineering · 1992 · 59 citations

Engineering, Electron-beam Lithography, New Shapes +16

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