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Bond‐Strength Measurements Related to Silicon Surface Hydrophilicity
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1992
Year
Materials ScienceEngineeringBond StrengthSurface ScienceApplied PhysicsMaterials CharacterizationSilicon Surface HydrophilicityFusion BondingSurface EngineeringInterfacial PhenomenaSurface NanotechnologyStrong BondSurface TreatmentChemistrySilicon On InsulatorHybrid MaterialsSurface Nanoengineering
The hydrophilicity level of commonly used surface treatments prior to silicon fusion bonding has been measured and related to a resulting bond strength. The necessity of hydrophilic silicon surfaces to yield a strong bond has been questioned, even counter‐proved. The strongest bonds measured were for hydrophobic, wafers annealed at 800°C.