Journal of The Electrochemical Society · 1992 · 67 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface EngineeringSurface ScienceSilicon MaterialsSurface CharacterizationSurface HydrophilicitySurface HydrophobicitySurface ModificationWafer BondingBond StrengthBondingBonding Strength MeasurementFusion BondingHydrophilicityHydrophilicity EffectsSiliconSilicon Surface Science
The hydrophilicity level of commonly used surface treatments prior to silicon fusion bonding has been measured and related to a resulting bond strength. The necessity of hydrophilic silicon surfaces to yield a strong bond has been questioned, even counter‐proved. The strongest bonds measured were for hydrophobic, wafers annealed at 800°C.