Concepedia

Microactuators

Microactuator is a miniaturized electromechanical device that converts an input energy signal into controlled mechanical motion or force at the microscale, distinguished from larger-scale actuators by its fabrication using micromachining techniques and operation within micro-electromechanical systems (MEMS) or similar precision applications.

1.5K

Publications

72.9K

Citations

4.1K

Authors

913

Institutions

Publications per year

2017–2026

232

Variants

Microactuator

Parents

Publications

1.5K

The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture

Mohamed Gad‐el‐Hak · Journal of Fluids Engineering · 1999 · 1.3K citations

, , +16

Photocontrol of fluid slugs in liquid crystal polymer microactuators

Jiu‐an Lv, Yuyun Liu, Jia Wei et al. · Nature · 2016 · 1K citations

, , +14

Controlled flight of a microrobot powered by soft artificial muscles

Yufeng Chen, Huichan Zhao, Jie Mao et al. · Nature · 2019 · 833 citations · Full text

, , +14

Microelectromechanical systems (MEMS): fabrication, design and applications

Jack W. Judy · Smart Materials and Structures · 2001 · 817 citations

, , +16

Recent Advances in Mechanical Micromachining

D. A. Dornfeld, Sangkee Min, Yoshimi TAKEUCHI · CIRP Annals · 2006 · 807 citations · Full text

, , +13

1–5 of 1.5K

Authors

4.1K

  1. HF
    Hiroyuki Fujita

    The University of Tokyo, Japan

    39 publications · 2.1K citations

    23

    h-index

  2. BJ
    Bradley J. Nelson

    ETH Zurich, Switzerland

    16 publications · 998 citations

    16

    h-index

  3. TF
    Toshio Fukuda

    Nagoya University, Japan

    19 publications · 781 citations

    14

    h-index

  4. BR
    Bruce R. Donald

    Duke University, United States

    12 publications · 1.1K citations

    12

    h-index

  5. MG
    Mark G. Allen

    Georgia Institute of Technology, United States

    13 publications · 530 citations

    12

    h-index

1–5 of 4.1K

Institutions

913

  1. The University of Tokyo

    Tokyo, Japan

    27 h-index

    140 publications

    5.4K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    25 h-index

    146 publications

    8.2K citations

  3. University of California, Berkeley

    Berkeley, United States

    25 h-index

    117 publications

    8.2K citations

  4. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    21 h-index

    79 publications

    3.5K citations

  5. ETH Zurich

    Zurich, Switzerland

    20 h-index

    86 publications

    5.9K citations

  6. University of California, Los Angeles

    Los Angeles, United States

    20 h-index

    51 publications

    4.2K citations

  7. Cornell University

    Ithaca, United States

    18 h-index

    55 publications

    3.5K citations

  8. University of Michigan

    Ann Arbor, United States

    17 h-index

    75 publications

    1.8K citations

1–8 of 913

Venues

  1. Journal of Microelectromechanical Systems

    113 publications · 9.2K citations

    50

    h-index

  2. Sensors and Actuators A Physical

    128 publications · 5.7K citations

    41

    h-index

  3. Journal of Micromechanics and Microengineering

    JMM · 122 publications · 5.4K citations

    39

    h-index

  4. IEEE/ASME Transactions on Mechatronics

    33 publications · 1.9K citations

    24

    h-index

  5. Microsystem Technologies

    42 publications · 1K citations

    22

    h-index

1–5