Electron Beam Lithography

Electron Beam Lithography is a maskless micro- and nanofabrication lithography technique that patterns resist-coated substrates by scanning a focused beam of electrons to write custom nanoscale features.

4.5K

Publications

188.7K

Citations

15.4K

Authors

1.9K

Institutions

Publications per year

2017–2026

589

Variants

Ebl

Parents

Microfabrication

Children

Backscattering EffectsBeam BlankingBeam Spot SizeElectron Beam Resist MaterialsForward Scattering EffectsLift-off PatterningLine-edge RoughnessMultilayer Resist ProcessingNanofabrication Of Nanoelectronic DevicesNanofabrication Of Photonic Structures

Publications

4.5K

Nanoimprint Lithography: Methods and Material Requirements

L. Jay Guo · Advanced Materials · 2007 · 1.8K citations · Full text

Engineering, Materials Engineering, Materials Science +17

Molecular Rulers for Scaling Down Nanostructures

A. Hatzor, Paul S. Weiss · Science · 2001 · 1.7K citations · Full text

Engineering, Materials Engineering, Materials Science +17

CASINO V2.42—A Fast and Easy‐to‐use Modeling Tool for Scanning Electron Microscopy and Microanalysis Users

Dominique Drouin, Alexandre Réal Couture, Dany Joly et al. · Scanning · 2007 · 1.5K citations

Engineering, Electrical Engineering, Materials Science +13

Full-colour quantum dot displays fabricated by transfer printing

Tae‐Ho Kim, Kyung-Sang Cho, Eun Kyung Lee et al. · Nature Photonics · 2011 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +14

Electron beam lithography: resolution limits and applications

Christophe Vieu, F. Carcenac, A. Pépin et al. · Applied Surface Science · 2000 · 1.1K citations

Engineering, Materials Engineering, Materials Science +14

1–5 of 4.5K

Authors

15.4K

HI
Henry I. Smith
Massachusetts Institute of Technology, United States
36 publications · 1.9K citations
22
h-index
PD
Philip D. Rack
University of Tennessee at Knoxville, United States
23 publications · 1.2K citations
20
h-index
TH
T. H. P. Chang
IBM Research - Thomas J. Watson Research Center, United States
31 publications · 1.6K citations
20
h-index
HG
H. G. Craighead
Cornell University, United States
25 publications · 1.3K citations
20
h-index
KK
Karl K. Berggren
Massachusetts Institute of Technology, United States
23 publications · 2K citations
20
h-index

1–5 of 15.4K

Institutions

1.9K

1–8 of 1.9K

Venues

Applied Physics Letters
318 publications · 19.1K citations
76
h-index
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
515 publications · 19.5K citations
62
h-index
Nano Letters
85 publications · 8.9K citations
55
h-index
Nanotechnology
185 publications · 6.6K citations
46
h-index
ACS Nano
61 publications · 4.3K citations
39
h-index

1–5