Concepedia

Beam Blanking

Beam Blanking is a beam control technique in electron beam lithography that temporarily deflects the electron beam away from the sample surface to halt exposure, thereby preventing unintended patterning during movement between designated writing locations.

37

Publications

1.1K

Citations

143

Authors

47

Institutions

Publications per year

2017–2026

7

Parents

Publications

37

The story behind the blank spot

Zbigniew Żylicz · American Journal of Hospice and Palliative Medicine® · 1993 · 125 citations

, , +2

4D Scanning Ultrafast Electron Microscopy: Visualization of Materials Surface Dynamics

Omar F. Mohammed, Ding‐Shyue Yang, Samir Kumar Pal et al. · Journal of the American Chemical Society · 2011 · 104 citations

, , +17

High‐performance X‐ray detection in a new analytical electron microscope

Charles E. Lyman, Joseph I. Goldstein, D. B. Williams et al. · Journal of Microscopy · 1994 · 60 citations

, , +14

High-Density Recording Using an Electron Beam Recorder

Yasumitsu Wada, Masahiro Katsumura, Yoshiaki Kojima et al. · Japanese Journal of Applied Physics · 2001 · 57 citations

, , +12

Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays

Masayoshi Esashi, Akira Kojima, Naokatsu Ikegami et al. · Microsystems & Nanoengineering · 2015 · 56 citations · Full text

, , +16

1–5 of 37

Authors

143

  1. PK
    P. Kruit

    Delft University of Technology, Netherlands

    3 publications · 84 citations

    3

    h-index

  2. JP
    Jacob P. Hoogenboom

    Delft University of Technology, Netherlands

    3 publications · 84 citations

    3

    h-index

  3. CK
    Christof Klein

    IMS Nanofabrication (Austria), Austria

    2 publications · 28 citations

    2

    h-index

  4. MW
    Mathijs W. H. Garming

    Delft University of Technology, Netherlands

    2 publications · 53 citations

    2

    h-index

  5. IG
    I. Gerward C. Weppelman

    Delft University of Technology, Netherlands

    2 publications · 72 citations

    2

    h-index

1–5 of 143

Institutions

47

  1. Delft University of Technology

    Delft, The Netherlands

    3 h-index

    13 publications

    377 citations

  2. IMS Nanofabrication (Austria)

    Vienna, Austria

    3 h-index

    9 publications

    150 citations

  3. Simon Fraser University

    Burnaby, Canada

    1 h-index

    2 publications

    28 citations

  4. Pennsylvania State University

    State College, United States

    1 h-index

    3 publications

    63 citations

  5. Northwestern University

    Evanston, United States

    1 h-index

    1 publications

    16 citations

  6. Stanford University

    Stanford, United States

    1 h-index

    4 publications

    40 citations

  7. University of Notre Dame

    Notre Dame, United States

    1 h-index

    5 publications

    80 citations

  8. Lund University

    Lund, Sweden

    1 h-index

    9 publications

    153 citations

1–8 of 47

Venues

  1. Japanese Journal of Applied Physics

    JJAP · 3 publications · 105 citations

    3

    h-index

  2. Review of Scientific Instruments

    3 publications · 59 citations

    3

    h-index

  3. Ultramicroscopy

    2 publications · 43 citations

    2

    h-index

  4. 2

    h-index

  5. 2

    h-index

1–5