Masahiro Katsumura

High-Density Recording Using an Electron Beam Recorder

Yasumitsu Wada, Masahiro Katsumura, Yoshiaki Kojima et al. · Japanese Journal of Applied Physics · 2001 · 57 citations

Photonics, Electrical Engineering, Electron Beam Recorder +11

High Density Mastering Using Electron Beam

Yoshiaki Kojima, Hiroaki Kitahara, Osamu Kasono et al. · Japanese Journal of Applied Physics · 1998 · 42 citations

Engineering, Physics, Air Spindle Motor +9

Enhanced resolution and groove-width simulation in cold development of ZEP520A

Takeru Okada, Jiro Fujimori, Makoto Aida et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 24 citations

Materials Science, Engineering, Electron-beam Lithography +13

Electron Beam Recording beyond 200 Gbit/in² Density for Next Generation Optical Disk Mastering

Masahiro Katsumura, Megumi Sato, Kazunobu Hashimoto et al. · Japanese Journal of Applied Physics · 2005 · 17 citations

Engineering, Electron-beam Lithography, Microscopy +17

Electron Beam Recorder for Patterned Media Mastering

Hiroaki Kitahara, Yuhei Uno, Hiroaki Suzuki et al. · Japanese Journal of Applied Physics · 2010 · 15 citations

Patterned Media, Patterned Media Production, Electrical Engineering +13