Concepedia

Masayoshi Esashi

ME

Statistics

Publications

308

Citations

13.3K

H-Index

56

Active since

1973

Affiliations

Tohoku University(Current)

Advanced Institute of Materials Science

Masayoshi Esashi is an author at Tohoku University specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringMicrofabricationApplied PhysicsMaterial ScienceMechanical EngineeringMicroelectronicsElectrical EngineeringInstrumentationMicrofluidicsBiomedical Engineering

Publications per year

1973–2021

308

Publications

308

Microflow devices and systems

Sunao Shoji, Masayoshi Esashi · Journal of Micromechanics and Microengineering · 1994 · 494 citations

Flow Control, Engineering, Micromachines +14

Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus

Xinxin Li, Takahito Ono, Yuelin Wang et al. · Applied Physics Letters · 2003 · 369 citations

Materials Science, Single-crystalline-silicon Cantilever Resonators, Engineering +13

Wafer level packaging of MEMS

Masayoshi Esashi · Journal of Micromechanics and Microengineering · 2008 · 352 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +17

Energy dissipation in submicrometer thick single-crystal silicon cantilevers

Jinling Yang, Takahito Ono, Masayoshi Esashi · Journal of Microelectromechanical Systems · 2002 · 305 citations

Engineering, Micromechanics, Mechanical Engineering +21

Silicon Micromachining

Masayoshi Esashi · 1998 · 230 citations

Materials Science, Engineering, Soft Robotics +14

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