Masayoshi Esashi

Microflow devices and systems

S. Shoji, Masayoshi Esashi · Journal of Micromechanics and Microengineering · 1994 · 496 citations

Engineering, Chemical Engineering, Mechanical Engineering +17

Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young’s modulus

Xinxin Li, Takahito Ono, Yuelin Wang et al. · Applied Physics Letters · 2003 · 370 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Wafer level packaging of MEMS

Masayoshi Esashi · Journal of Micromechanics and Microengineering · 2008 · 353 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Energy dissipation in submicrometer thick single-crystal silicon cantilevers

Jinling Yang, Takahito Ono, Masayoshi Esashi · Journal of Microelectromechanical Systems · 2002 · 309 citations

Engineering, Materials Science, Mechanical Engineering +13

Vacuum packaging for microsensors by glass-silicon anodic bonding

Hiroshi Henmi, S. Shoji, Y. Shoji et al. · Sensors and Actuators A Physical · 1994 · 230 citations

Engineering, Materials Engineering, Materials Science +14