Hiroshi Henmi is an author at Tohoku University specializing in microfabrication, engineering, and applied physics.
Publications per year
1994–1994
1
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Vacuum packaging for microsensors by glass-silicon anodic bonding
Hiroshi Henmi, Sunao Shoji, Y. Shoji et al. · Sensors and Actuators A Physical · 1994 · 227 citations
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