Concepedia

Publication | Closed Access

Electron beam lithography: resolution limits and applications

DOI

1.1K

Citations

11

References

2000

Year

Christophe Vieu, F. Carcenac, A. Pépin, Y. Chen, M. Mejias, A. Lebib, L. Manin-Ferlazzo, Laurent Couraud, H. Launois
Applied Surface Science

References

YearCitations

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