Electron beam lithography: resolution limits and applications

Single-electron devices and their applications

K. K. Likharev · Proceedings of the IEEE · 1999 · 1.5K citations

Engineering, Electrical Engineering, Physics +14

Patterned magnetic nanostructures and quantized magnetic disks

Stephen Y. Chou · Proceedings of the IEEE · 1997 · 396 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of 5–7 nm wide etched lines in silicon using 100 keV electron-beam lithography and polymethylmethacrylate resist

Wei Chen, H. Ahmed · Applied Physics Letters · 1993 · 265 citations

Engineering, Materials Engineering, Materials Science +17

10-nm linewidth electron beam lithography on GaAs

H. G. Craighead, Richard Howard, L. D. Jackel et al. · Applied Physics Letters · 1983 · 138 citations

Engineering, Electrical Engineering, Materials Science +10

Fabrication of sub-10 nm structures by lift-off and by etching after electron-beam exposure of poly(methylmethacrylate) resist on solid substrates

Wei Chen, H. Ahmed · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 102 citations

Natural Sciences, Materials Engineering, Materials Science +17