Concepedia

Beam Spot Size

Beam Spot Size is the minimum diameter of a focused electron beam in electron beam lithography, serving as a critical metric that determines the finest achievable feature resolution due to the physical and instrumental limitations governing beam focusing.

2K

Publications

84.1K

Citations

8.2K

Authors

1.6K

Institutions

Publications per year

2017–2026

299

Parents

Publications

2K

Sharper Focus for a Radially Polarized Light Beam

Ralf Dorn, S. Quabis, Gerd Leuchs · Physical Review Letters · 2003 · 2.1K citations

, , +10

Simple technique for measurements of pulsed Gaussian-beam spot sizes

J. M. Liu · Optics Letters · 1982 · 1.8K citations

, , +15

Ion-beam sculpting at nanometre length scales

Jiali Li, Derek Stein, Ciaran J. McMullan et al. · Nature · 2001 · 1.7K citations · Full text

, , +9

Electron beam lithography: resolution limits and applications

Christophe Vieu, F. Carcenac, A. Pépin et al. · Applied Surface Science · 2000 · 1.1K citations

, , +14

Single-cycle terahertz pulses with amplitudes exceeding 1 MV/cm generated by optical rectification in LiNbO3

Hideki Hirori, Akihiro Doi, F. Blanchard et al. · Applied Physics Letters · 2011 · 853 citations · Full text

, , +14

1–5 of 2K

Authors

8.2K

  1. CG
    Christian G. Schroer

    Deutsches Elektronen-Synchrotron DESY, Germany

    12 publications · 833 citations

    12

    h-index

  2. MY
    Makina Yabashi

    SPring-8, Japan

    11 publications · 539 citations

    11

    h-index

  3. WB
    W. B. Mori

    University of California, Los Angeles, United States

    10 publications · 1K citations

    10

    h-index

  4. KY
    Kazuto Yamauchi

    The University of Osaka, Japan

    10 publications · 523 citations

    10

    h-index

  5. YS
    Yasuhisa Sano

    The University of Osaka, Japan

    9 publications · 463 citations

    9

    h-index

1–5 of 8.2K

Institutions

1.6K

  1. Centre National de la Recherche Scientifique

    Paris, France

    25 h-index

    146 publications

    15.3K citations

  2. SLAC National Accelerator Laboratory

    Menlo Park, United States

    21 h-index

    220 publications

    8.1K citations

  3. Lawrence Livermore National Laboratory

    Livermore, United States

    21 h-index

    129 publications

    4.3K citations

  4. High Energy Accelerator Research Organization

    Tsukuba, Japan

    21 h-index

    157 publications

    6K citations

  5. Commissariat à l'Énergie Atomique et aux Énergies Alternatives

    Paris, France

    20 h-index

    86 publications

    2.7K citations

  6. European Synchrotron Radiation Facility

    Grenoble, France

    20 h-index

    115 publications

    9.6K citations

  7. Lawrence Berkeley National Laboratory

    Berkeley, United States

    20 h-index

    138 publications

    7.5K citations

  8. Stanford University

    Stanford, United States

    19 h-index

    118 publications

    5.4K citations

1–8 of 1.6K

Venues

  1. Applied Physics Letters

    71 publications · 4.5K citations

    34

    h-index

  2. Review of Scientific Instruments

    78 publications · 3.5K citations

    32

    h-index

  3. Applied Optics

    81 publications · 3.1K citations

    30

    h-index

  4. Optics Express

    71 publications · 2.9K citations

    30

    h-index

  5. Physical Review Letters

    PRL · 38 publications · 4.5K citations

    29

    h-index

1–5