Ion-beam sculpting at nanometre length scales - Concepedia

Concepedia

Publication | Open Access

Ion-beam sculpting at nanometre length scales

DOI Full Paper Access

1.6K

Citations

20

References

2001

Year

Jiali Li, Derek Stein, Ciaran J. McMullan, Daniel Branton, Michael J. Aziz, J. A. Golovchenko

EngineeringElectron-beam LithographyMicroscopyNanotechnologyNanometre Length ScalesApplied PhysicsIon Beam

References

	Year	Citations

Page 1