Concepedia

Focused Ion Beam Patterning

Focused Ion Beam Patterning is a direct-write nanofabrication technique that uses a focused beam of ions to selectively sputter material from a thin film, enabling high-precision patterning at the nanoscale with localized milling capability.

1.2K

Publications

49.5K

Citations

4.6K

Authors

1K

Institutions

Publications per year

2017–2026

172

Variants

Fib Patterning

Parents

Publications

1.2K

Ion-beam sculpting at nanometre length scales

Jiali Li, Derek Stein, Ciaran J. McMullan et al. · Nature · 2001 · 1.7K citations · Full text

, , +9

Gas-assisted focused electron beam and ion beam processing and fabrication

Ivo Utke, P. Hoffmann, J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 1K citations · Full text

, , +16

Focused ion beam technology and applications

J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 611 citations

, , +11

Focused-ion-beam thinning of frozen-hydrated biological specimens for cryo-electron microscopy

Michael Marko, Chyongere Hsieh, Richard Schalek et al. · Nature Methods · 2007 · 578 citations

, , +12

Planar Lenses Based on Nanoscale Slit Arrays in a Metallic Film

Lieven Verslegers, Peter B. Catrysse, Zongfu Yu et al. · Nano Letters · 2008 · 496 citations

, , +17

1–5 of 1.2K

Authors

4.6K

  1. JG
    J. Giérak

    Centre National de la Recherche Scientifique, France

    24 publications · 837 citations

    18

    h-index

  2. JM
    J. Melngailis

    Massachusetts Institute of Technology, United States

    17 publications · 2.1K citations

    14

    h-index

  3. LR
    L. R. Harriott

    AT&T (United States), United States

    14 publications · 393 citations

    13

    h-index

  4. YW
    Yuh‐Lin Wang

    Institute of Atomic and Molecular Sciences, Academia Sinica, Taiwan

    13 publications · 483 citations

    12

    h-index

  5. LB
    L. Bischoff

    Helmholtz-Zentrum Dresden-Rossendorf, Germany

    15 publications · 358 citations

    12

    h-index

1–5 of 4.6K

Institutions

1K

  1. Centre National de la Recherche Scientifique

    Paris, France

    28 h-index

    271 publications

    9.6K citations

  2. University of Cambridge

    Cambridge, United Kingdom

    18 h-index

    82 publications

    4.4K citations

  3. Kyoto University

    Kyoto, Japan

    16 h-index

    76 publications

    2.4K citations

  4. Helmholtz-Zentrum Dresden-Rossendorf

    Dresden, Germany

    16 h-index

    76 publications

    2K citations

  5. Nanyang Technological University

    Singapore, Singapore

    16 h-index

    63 publications

    1.8K citations

  6. Oak Ridge National Laboratory

    Oak Ridge, United States

    15 h-index

    77 publications

    3K citations

  7. AT&T (United States)

    Bedminster, United States

    15 h-index

    69 publications

    1.8K citations

  8. Raith (Germany)

    Dortmund, Germany

    15 h-index

    56 publications

    1.4K citations

1–8 of 1K

Venues

  1. Applied Physics Letters

    105 publications · 3.9K citations

    36

    h-index

  2. 32

    h-index

  3. Nanotechnology

    59 publications · 2.6K citations

    27

    h-index

  4. Nano Letters

    29 publications · 2.5K citations

    23

    h-index

  5. 23

    h-index

1–5