Statistics
Publications
146
Citations
4.7K
Authors
14
Location
Dortmund, Germany
146
14
17
h-index
16
h-index
14
h-index
12
h-index
12
h-index
1–5 of 14
Sub-5nm FIB direct patterning of nanodevices
J. Giérak, Ali Madouri, Anne‐Laure Biance et al. · Microelectronic Engineering · 2007 · 143 citations
Nanopore fabrication and characterization by helium ion microscopy
Daniel Emmrich, André Beyer, Achim Nadzeyka et al. · Applied Physics Letters · 2016 · 118 citations · Full text
Roadmap for focused ion beam technologies
Katja Höflich, G. Hobler, Frances I. Allen et al. · Applied Physics Reviews · 2023 · 113 citations · Full text
1–5 of 146